Virtual Union Catalogue
Microfabrication and nanomanufacturing /
CSIR - Institute of Minerals and Materials Technology (IMMT)
| Field | Value | |
| Title |
Microfabrication and nanomanufacturing /
|
|
| Creator |
Jackson, Mark J.
|
|
| Type |
text
|
|
| Publisher |
Boca Raton, FL : CRC/Taylor & Francis,
|
|
| Date |
2006.
|
|
| Language |
eng
|
|
| Description |
Includes bibliographical references and index.
|
|
| Subject |
Microelectronics.
Integrated circuits Nanomanufacturing. Microelectromechanical systems |
|
| Identifier |
http://www.loc.gov/catdir/toc/fy0702/2005049275.html
http://www.loc.gov/catdir/enhancements/fy0703/2005049275-d.html URN:ISBN:0824724313 (Hardcover) URN:ISBN:9780824724313 |
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