Record Details

Introduction to microfabrication /

CSIR - Institute of Minerals and Materials Technology (IMMT)


 
 
Field Value
 
Title Introduction to microfabrication /
 
Creator Franssila, Sami.
 
Type text
 
Publisher Chichester, West Sussex [England] : John Wiley & Sons,
 
Date 2010.
 
Language eng
 
Description Includes bibliographical references and index.
 
Subject Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
 
Identifier http://www.loc.gov/catdir/enhancements/fy1201/2010010076-b.html
http://www.loc.gov/catdir/enhancements/fy1201/2010010076-d.html
http://www.loc.gov/catdir/enhancements/fy1201/2010010076-t.html
URN:ISBN:9780470749838