Virtual Union Catalogue
Thin film materials technology : sputtering of compound materials /
CSIR - Institute of Minerals and Materials Technology (IMMT)
| Field | Value | |
| Title |
Thin film materials technology : sputtering of compound materials /
|
|
| Creator |
Wasa, Kiyotaka.
Kitabatake, Makoto. Adachi, Hideaki. |
|
| Type |
text
|
|
| Publisher |
Norwich, NY : William Andrew Pub. ; Heidelberg : Springer,
|
|
| Date |
c2004.
|
|
| Language |
eng
|
|
| Description |
Includes bibliographical references and index.
|
|
| Subject |
Cathode sputtering (Plating process)
Thin films. |
|
| Identifier |
http://www.loc.gov/catdir/toc/ecip047/2003018016.html
http://www.loc.gov/catdir/enhancements/fy0632/2003018016-d.html URN:ISBN:0815514832 (alk. paper) |
|